钙钛矿

钙钛矿通过各种工艺制造，如真空热蒸发或旋涂。通常，在后一种情况下，后续的惰性气体氛围下的热退火也被应用。同样，CIGS的生长是一个基于共蒸发或溅射和硒化的复杂的多步过程。InspiRe由于其毫秒级的快速采集速率，非常适合监测这种复杂且快速的生长和成相过程。

InspiRe根据材料和工艺要求，可用于VIS和NIR的各种波长范围。InspiRe的多头版本可根据需要提供。作为LayTec的所有原位测量工具，它可以通过TCP / IP或其他完善的接口与涂层系统的控制计算机以及制造执行系统( MES )进行接口。

应用

●  钙钛矿旋涂过程中快速变化的液体溶液薄膜的监测

●  在钙钛矿退火过程中提供实时反射信息，揭示物相或表面转变，包括可视化生长速率、表面粗糙度和吸收边

●  其他复杂和/或多组分材料的镀膜和退火时间优化

●  真空室中CIGS或TCO材料共蒸发或溅射过程的监测

英文：

Perovskites are manufactured by a variety of processes such as thermal evaporation in vacuum or spin coating. Typically, in the latter case, subsequent thermal annealing under inert gas atmosphere is also applied. Similarly, CIGS growth is a complex multi-step process based on co-evaporation or sputtering and selenization. InspiRe is well-suited for monitoring such complex and rapid growth and phase formation processes due to its rapid acquisition rates in the millisecond range.

InspiRe is available for various wavelength ranges in the VIS and NIR depending on materials and process requirements. Multi-head versions of InspiRe are available on request. As all of LayTec’s in-situ metrology tools it can be interfaced to the control computer of the coating system as well as to a manufacturing execution system (MES) by using TCP / IP or other well-established interfaces.

Applications

·  Monitoring of rapidly changing liquid solution films during perovskite spin coating

·  Providing real-time reflectance information during perovskite annealing revealing phase or surface transformations including visualization of growth rates, surface roughness and absorption edges

·  Optimization of coating and annealing times for other complex and / or multi-component materials

·  Monitoring of co-evaporation or sputtering processes for CIGS or TCO materials in vacuum chambers